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For over twenty years, the excimer laser industry has relied on our SPECTRA™ lithography gases. SPECTRA gases were used in the development of the earliest lasers for lithography and are now the most widely used excimer gases for DUV photolithography in the semiconductor industry.
Lasers in thousands of the world's wafer steppers and scanners use our state-of-the-art SPECTRA gases and gas mixtures.
Our customers include all of the major global laser, stepper and scanner manufacturers as well as many of the world's largest semiconductor manufacturers. They know they can rely on the highest quality laser gases coupled with in-depth knowledge of critical gas technologies.
Our customers also benefit from the development of new technologies and innovations driven by our Centres of Excellence such as the one for SPECTRA lithography gases in Alpha, US. Key areas of expertise include:
Full spectrum - we lead the market for the manufacture and purification of all raw materials necessary for photolithography
Cylinder expertise - based on our proprietary technologies for the handling and treatment of cylinders containing both inert and halogen (F2) gases
Mixing capabilities - we have pioneered highly specific mixing technologies to create multi-component mixtures that are completely homogeneous
Analytical technologies - with proprietary analytical technologies that surpass industry norms; all SPECTRA lithography cylinders are tested individually and provided with their own 'Certificate of Analysis'.
- Linde Gas Singapore Pte. Ltd.
Jurong Island facility
50 Jurong Island Highway
No. 5 Tuas Basin Link
Jurong Industrial Estate
Customer Service Centre